SUSS MicroTec Test Systems GmbH is a subsidiary of SUSS MicroTec AG, which is listed in Deutsche Börse AG's Prime Standard.

SUSS MicroTec is a leading supplier of process and test solutions for markets such as 3D Integration, Advanced Packaging, MEMS, Nanotechnology and Compound Semiconductor. High-quality solutions enable customers to increase process performance while reducing cost of ownership.

SUSS MicroTec supports more than 8,000 installed mask aligners, coaters, bonders and probe systems with a global infrastructure for applications and service. SUSS MicroTec is headquartered in Garching near Munich, Germany. For more information, visit www.suss.com.

Polytec GmbH has been providing world class high-tech solutions for static and dynamic characterisation of microstructures and MEMS; Polytec is known throughout the world for its market leadership in the design and manufacture of optical vibration measurement systems for in-plane and out of plane motions. The Microsystemanalyzer MSA-500 combines the stroboscopic Videomicroscopy (for In-Plane motion), the Laser Doppler Vibrometry (for Out of Plane Motions) and the White Light Interferometry (static 3D-Profiles) in one device. The UHF-120 Laser Doppler Vibrometer allows the dynamic characterization with vibration-frequencies up to 1.2GHz.

The Fraunhofer Research Institution for Electronic Nano Systems ENAS focuses on research and development in the field of smart systems integration by using micro and nano technologies with partners in Germany, Europe and world wide. Development of MEMS/NEMS, prototyping of sensor and actuator devices, integration of such devices together with micro- and nanoelectronic components into systems, design of components and systems, development and implementation of test and characterization of MEMS/NEMS are the main research areas which are related to the MEMUNITY activities. MEMS test methods have been developed and are applied for characterization of first samples from research and development as well as for production for many years.