Currently, the world of microdevice manufacturing lacks exact knowledge of the behavior of the materials used for building MEMS devices such as acceleration and pressure sensors, micromirrors and RF switches. The problem lies in the fact that the properties of these building blocks behave differently in the macro world, and therefore cannot be translated directly into the MEMS world. The goal of PAR-TEST is to define the behavior of these materials (their “PARameters”) and make them accessible for MEMS design engineers.

In this context, PAR-TEST is seeking the development of 3D measurement techniques for microsystems in a vacuum test environment. Furthermore, PAR-TEST will concentrate on methods that, when the results are extracted from the measurement data, will enable the determination of material quality parameters needed in the production of MEMS devices.

The task list of the PAR-TEST project also includes the analysis of in-plane and out-of-plane movements of MEMS devices at wafer level (such as acceleration) as well as the investigation of electrical contacts on the top side of the wafer when pressure is applied to the backside of the wafer. To be able to do all this, new methods for visualizing 3D-geometries, shifts and vibration will be necessary, and thus developed by the members of PARTEST. Existing techniques such as white light interferometry, confocal microscopy, laser Doppler vibrometry and stroboscopic microscopy are used as a basis for new analytical processes that will need to be developed.

All methods and techniques that are developed within the three years of PAR-TEST will be tested in real life. These results of the PAR-TEST project are highly anticipated, as they will provide far-reaching benefits for the industry. On one hand, PAR-TEST will equip MEMS producing companies with the processes to test the quality and function of their devices as early as possible in order to save time and money in the production process. On the other hand, PAR-TEST provides semiconductor equipment manufacturers the technology critical for developing the production and test systems of tomorrow.