Testing RF MEMS

The European Research Institute, IMEC, (Interuniversity MicroElectronics Center) uses a SUSS PAV150 at its Leuven (Belgium) facility to test RF MEMS devices within a high vacuum environment. The system enables reliability tests of MEMS under real-life conditions.

The PAV150 semiautomatic wafer probe system is the only prober that enables optical monitoring and testing of RF-MEMS at different pressures and temperatures with RF signals applied. It has a platen capable of holding up to 8 probe heads, 4 of which can hold RF probes and a thermal chuck for temperature dependent measurements from –10°C to +150°C. A further advantage is the second arm on the microscope turret which enables the microscope used for alignment to be swung out of the field of vision, and equipment such as a motion analyser to be ergonomically moved over the DUT.

The performance of the SUSS IZI Probes and their calibration substrate uniquely remains constant regardless of temperature (range: 10K to 393K).
IMEC has agreed to act as a European Demonstration Center for this type of probing technology and offers a test service for small batches of wafers to all interested.